[Download] "Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting" by Xiao-Sheng Zhang # eBook PDF Kindle ePub Free

eBook details

Title: Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting
Author : Xiao-Sheng Zhang
Release Date : January 01, 2015
Genre: Engineering,Books,Professional & Technical,Science & Nature,Power Resources,
Pages : * pages
Size : 6572 KB

Description

This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.